Allocating Reticles in an Automated Stocker for Semiconductor Manufacturing Facility.

Anna Benzoni Claude Yugma Pierre Bect Alain Planchais

Published in: WSC (2020)

Keyphrases

semiconductor manufacturing
discrete event simulation
process control
semi automated
fully automated
production system
fully automatic
database
real time
neural network
information retrieval
information systems
data structure
multiresolution
data driven
computer aided