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Dynamic Wet Etching of Silicon through Isopropanol Alcohol Evaporation.
Tiago S. Monteiro
Pamakstys Kastytis
Luis Miguel Gonçalves
Graça Minas
Susana Cardoso
Published in:
Micromachines (2015)
Keyphrases
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dynamic environments
neural network
search engine
thin film
data mining
multiscale
multi agent systems
low cost
high speed
computer simulation
high density
plasma etching