3ppm 1.0μA 32.768kHz MEMS-based oscillator.
Samira Zali AslShouvik MukherjeeLijun Will ChenKimo JooRajkumar PalwaiNiveditha ArumugamP. GalleMeghan PhadkeCharles GrosjeanJim SalviaHaechang LeeSudhakar PamartiTerri S. FiezKofi A. A. MakinwaAaron PartridgeVinod MenonPublished in: ISSCC (2014)