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Analytical Placement Considering the Electron-Beam Fogging Effect.

Jianli ChenYao-Wen ChangYu-Chen Huang
Published in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2021)
Keyphrases
  • electron beam
  • x ray
  • integrated circuit
  • semiconductor devices
  • design parameters
  • real world
  • expert systems
  • real time
  • fuzzy logic
  • particle swarm optimization