Reliability data's of 0.5 μm AlGaN/GaN on SiC technology qualification.
Benoit LambertJim ThorpeReza BehtashBernd SchauweckerFranck BourgeoisHelmut JungJoëlle BataillePatrick MezengeCyril GourdonCatherine OllivierDidier FloriotHervé BlanckPublished in: Microelectron. Reliab. (2012)
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