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Contoured device sample preparation technique for ±5 μm remaining silicon thicknesses that meets solid immersion lens requirements.
Chris Richardson
Gary Liechty
Clay Smith
Michael Karow
Published in:
Microelectron. Reliab. (2013)
Keyphrases
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semiconductor devices
field effect transistors
virtual reality
data collection
user requirements
sample size
steady state
high density
sample points
low cost
data sets
neural network
augmented reality
data acquisition
requirements engineering
depth from focus