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Characterization of semiconductor interfaces using a modified mixed mode bending apparatus.

J. ThijsseOlaf van der SluisJ. A. W. van DommelenWillem D. van DrielMarc G. D. Geers
Published in: Microelectron. Reliab. (2008)
Keyphrases
  • mixed mode
  • semiconductor manufacturing
  • object oriented
  • degrees of freedom
  • shape representation
  • database
  • user interface
  • distributed systems