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Characterization of semiconductor interfaces using a modified mixed mode bending apparatus.
J. Thijsse
Olaf van der Sluis
J. A. W. van Dommelen
Willem D. van Driel
Marc G. D. Geers
Published in:
Microelectron. Reliab. (2008)
Keyphrases
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mixed mode
semiconductor manufacturing
object oriented
degrees of freedom
shape representation
database
user interface
distributed systems