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Design, fabrication and characterization of pyroelectric thin film and its application for infrared gas sensors.
Qiu-lin Tan
Wendong Zhang
Chenyang Xue
Jijun Xiong
Jun Liu
Jun-hong Li
Ting Liang
Published in:
Microelectron. J. (2009)
Keyphrases
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infrared
multi sensor
thin film
focal plane
infrared images
infrared sensors
electro optical
visible spectrum
real time
target detection and tracking
high density
infrared imagery
mobile robot
time of flight
plasma etching
data fusion
high speed
neural network