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Microfabrication of hybrid structure composed of rigid silicon and flexible polyimide membranes.
Sunao Murakami
Daisuke Ishihara
Masateru Araki
Tomoyoshi Horie
Naoto Ohira
Takahiro Ito
Published in:
NEMS (2017)
Keyphrases
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electron microscopy
three dimensional
real time
computer vision
low cost
tree structure
machine learning
learning algorithm
artificial intelligence
high speed
high density
active vibration control