Defect detection and classification on semiconductor wafers using two-stage geometric transformation-based data augmentation and SqueezeNet lightweight convolutional neural network.
Francisco López de la RosaJosé L. Gómez-SirventRafael MoralesRoberto Sánchez-ReolidAntonio Fernández-CaballeroPublished in: Comput. Ind. Eng. (2023)