Near-field detection of photon emission from silicon with 30 nm spatial resolution.
D. IsakovA. A. B. TioT. GeinzerJ. C. H. PhangY. ZhangL. J. BalkPublished in: Microelectron. Reliab. (2008)
Keyphrases
- spatial resolution
- high resolution
- multispectral
- frame rate
- image reconstruction
- transmission electron microscopy
- video camera
- high spatial resolution
- temporal resolution
- spatial information
- multispectral images
- hyperspectral imagery
- spectral resolution
- low cost
- object detection
- display devices
- x ray
- high speed
- multi view
- super resolution algorithm
- single shot
- three dimensional