Modeling and analysis of semiconductor manufacturing systems with degraded behavior using Petri nets and siphons.
MuDer JengXiaolan XiePublished in: IEEE Trans. Robotics Autom. (2001)
Keyphrases
- manufacturing systems
- petri net
- colored petri nets
- stochastic petri net
- petri net model
- manufacturing environment
- discrete event systems
- complex systems
- process model
- fuzzy petri net
- ims ld
- fuzzy logic
- holonic manufacturing systems
- sequence diagrams
- production cost
- shop floor
- control structure
- control method
- neural network