Large-Area Metalens Directly Patterned on a 12-Inch Glass Wafer using Immersion Lithography for Mass Production.
Qize ZhongYuan DongDongdong LiNanxi LiTing HuZhengji XuYanyan ZhouKeng Heng LaiYuan Hsing FuVladimir BliznetsovHou-Jang LeeWei Loong LohShiyang ZhuQunying LinNavab SinghPublished in: OFC (2020)