Silicon MEMS actuator with no space gap between driving electrodes.

Tomoki Nishino Kazuki Baba Yuri Nakai Hiroshi Tanigawa Kenichiro Suzuki

Published in: NEMS (2016)

Keyphrases

high density
control system
low cost
databases
real time
neural network
search space
low dimensional
parameter space
closed loop
input space
higher dimensional