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Hiroshi Tanigawa
Publication Activity (10 Years)
Years Active: 2016-2016
Publications (10 Years): 1
Top Topics
Parameter Space
Closed Loop
Higher Dimensional
Databases
Top Venues
NEMS
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Publications
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Tomoki Nishino
,
Kazuki Baba
,
Yuri Nakai
,
Hiroshi Tanigawa
,
Kenichiro Suzuki
Silicon MEMS actuator with no space gap between driving electrodes.
NEMS
(2016)