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Simulation for the Feasibility of IGZO Channel in 3D Vertical FeFET Memory Based on TCAD.
Zhichao Du
Chuanxue Sun
Xiaoyu Dou
Pengpeng Sang
Xuepeng Zhan
Chengji Jin
Jixuan Wu
Jiezhi Chen
Published in:
ICTA (2023)
Keyphrases
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