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Microassembly of 3-D MEMS structures utilizing a MEMS microgripper with a robotic manipulator.

Nikolai DechevWilliam L. CleghornJames K. Mills
Published in: ICRA (2003)
Keyphrases
  • robotic manipulator
  • force feedback
  • force sensing
  • control scheme
  • real time
  • degrees of freedom
  • image sequences
  • robotic systems
  • multiple models
  • end effector