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On Synchronization of Generic Lithography Machine Open-chains using a Novel Fine-Positioning Stage System.

Yazan Mohammad Al-RawashdehMohammad Al JanaidehMarcel Heertjes
Published in: CCTA (2021)
Keyphrases
  • domain specific
  • genetic algorithm
  • coarse to fine
  • generic model
  • case study
  • multiscale
  • expert systems
  • multistage
  • flowshop
  • chaotic systems
  • printed circuit boards
  • training stage
  • batch processing
  • multiple stages