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Extraction of elastic-plastic material properties of thin films through nanoindentaion technique with support of numerical methods.
Lukasz Dowhan
Artur Wymyslowski
Pawel Janus
Magdalena Ekwinska
Olaf Wittler
Published in:
Microelectron. Reliab. (2011)
Keyphrases
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thin film
numerical methods
material properties
finite element
differential equations
neural network
computer vision
d objects
higher order
motion analysis
finite element analysis