Micro Coriolis Mass Flow Sensor with Large Channel Diameter by Wet Etching of Silicon.
Qihui YuMahdieh YariesboueiRemco J. WiegerinkJoost C. LöttersPublished in: IEEE SENSORS (2022)
Keyphrases
- field effect transistors
- plasma etching
- flow velocity
- high density
- thin film
- steady state
- flow rate
- sensor networks
- multi channel
- sensor data
- integrated circuit
- high speed
- low cost
- communication channels
- magnetic recording
- low density
- real time
- fluid flow
- channel coding
- flow patterns
- multiple access
- mathematical analysis
- conveyor belt
- blood flow
- multi sensor
- flow field
- frequency domain