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Design, fabrication and characterization of a zinc oxide thin-film piezoelectric accelerometer.
Chinmoy Saayujya
Joel Shi-Quan Tan
Yanhui Yuan
Yoke-Rung Wong
Hejun Du
Published in:
ISSNIP (2014)
Keyphrases
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thin film
high density
design process
electron microscopy
learning algorithm
gesture recognition
design methodology