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Steady-State Throughput and Scheduling Analysis of Multi-Cluster Tools for Semiconductor Manufacturing: A Decomposition Approach.

Jingang YiShengwei DingDezhen Song
Published in: ICRA (2005)
Keyphrases
  • steady state
  • semiconductor manufacturing
  • scheduling problem
  • markov chain
  • genetic regulatory networks
  • queue length
  • software engineering
  • response time
  • power consumption
  • product form