Control design for a 6 DOF e-beam lithography stage.

Pai-Hsueh Yang Brian Alamo Gerry B. Andeen

Published in: ACC (2001)

Keyphrases

initial stages
user interface
mechanical systems
design decisions
high level synthesis
database
electron beam
real time control
control structure
intelligent control
control strategies
control strategy
design process
control system
evolutionary algorithm
expert systems
case study