Login / Signup

Plasma-induced photon irradiation damage on low-k dielectrics enhanced by Cu-line layout.

Taro IkedaAkira TaniharaNobuhiko YamamotoShigeru KasaiKoji EriguchiKouichi Ono
Published in: ICICDT (2015)
Keyphrases
  • high energy
  • line segments
  • layout design
  • genetic algorithm
  • object recognition
  • data sets
  • information systems
  • knowledge base
  • scanning electron microscope
  • rendezvous search