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Akira Tanihara
Publication Activity (10 Years)
Years Active: 2015-2015
Publications (10 Years): 1
Top Topics
Layout Design
High Energy
Scanning Electron Microscope
Top Venues
ICICDT
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Publications
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Taro Ikeda
,
Akira Tanihara
,
Nobuhiko Yamamoto
,
Shigeru Kasai
,
Koji Eriguchi
,
Kouichi Ono
Plasma-induced photon irradiation damage on low-k dielectrics enhanced by Cu-line layout.
ICICDT
(2015)