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Thermal Studies of BEOL-compatible Top-Gated Atomically Thin ALD In2O3 FETs.

Pai-Ying LiaoSami AlajlouniMengwei SiZhuocheng ZhangZehao LinJinhyun NohCalista WilkAli ShakouriPeide D. Ye
Published in: VLSI Technology and Circuits (2022)
Keyphrases
  • infrared
  • empirical studies
  • machine learning
  • learning algorithm
  • decision trees
  • database systems
  • computer science
  • steady state
  • power plant
  • electrical properties