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Yield Enhancement with Particle Defects Reduction.
Kiyoshi Mori
Nam T. Nguyen
Dewey Keeton
Ross Burns
Published in:
DFT (1994)
Keyphrases
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image enhancement
image processing
defect detection
databases
digital libraries
neural network
genetic algorithm
artificial intelligence
metadata
case study
multi agent
data structure
color images
probabilistic model
contrast enhancement
defect classification