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Strontium doped hafnium oxide thin films: Wide process window for ferroelectric memories.

Tony SchenkStefan MuellerUwe SchroederRobin MaterlikAlfred KerschMihaela PopoviciChristoph AdelmannSven Van ElshochtThomas Mikolajick
Published in: ESSDERC (2013)
Keyphrases
  • thin film
  • room temperature
  • wide range
  • learning algorithm
  • sliding window
  • process model
  • high density