Sensor Size, 32.5μg/√Hz Noise Floor, High Efficiency MEMS Capacitive Accelerometer Using High-Voltage Pulse Excitation Technique.
Longjie ZhongPengpeng ShangShubin LiuWenfei CaoLichen FengYuhua LiangZhangming ZhuPublished in: CICC (2024)
Keyphrases
- high efficiency
- high voltage
- arbitrary shape
- high accuracy
- sensor noise
- sensor networks
- high speed
- real and synthetic datasets
- operating conditions
- density based clustering
- low frequency
- high frame rate
- sensor data
- frame rate
- partial discharge
- memory space
- data sets
- steady state
- dynamic programming
- decision making
- real time
- gesture recognition
- activity recognition
- sensor fusion
- fault diagnosis
- artificial intelligence
- normal operation