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Fault isolation in a case study of failure analysis on Metal-Insulator-Metal capacitor structures.
V. Giuffrida
P. Barbarino
Giuseppe Muni
Giancarlo Calvagno
G. Latteo
Domenico Mello
Published in:
Microelectron. Reliab. (2015)
Keyphrases
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high temperature
case study
decision support system
service oriented
failure detection
metal oxide