A Precision Dose Control Circuit for Maskless E-Beam Lithography With Massively Parallel Vertically Aligned Carbon Nanofibers.
Sazia A. ElizaSyed Kamrul IslamTouhidur RahmanNora D. BullBenjamin J. BlalockL. R. BaylorM. Nance EricsonW. L. GardnerPublished in: IEEE Trans. Instrum. Meas. (2011)