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Fabrication and characterisation of nanostructure step height sample.
Xu Feng-Hua
Wu Xiao-tong
Zou Chun-long
Wang Sheng-Huai
Zhong Yu-ning
Published in:
Int. J. Comput. Sci. Math. (2020)
Keyphrases
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post processing
high density
genetic algorithm
artificial intelligence
test data
integrated circuit
randomly selected
multi step
real time
multiscale
high speed