An RF MEMS Variable Capacitor with Intelligent Bipolar Actuation.
Tamio IkehashiTakayuki MiyazakiHiroaki YamazakiAtsushi SuzukiEtsuji OgawaShinji MiyanoTomohiro SaitoTatsuya OhguroTakeshi MiyagiYoshiaki SugizakiNobuaki OtsukaHideki ShibataYoshiaki ToyoshimaPublished in: ISSCC (2008)