An RF MEMS Variable Capacitor with Intelligent Bipolar Actuation.

Tamio Ikehashi Takayuki Miyazaki Hiroaki Yamazaki Atsushi Suzuki Etsuji Ogawa Shinji Miyano Tomohiro Saito Tatsuya Ohguro Takeshi Miyagi Yoshiaki Sugizaki Nobuaki Otsuka Hideki Shibata Yoshiaki Toyoshima

Published in: ISSCC (2008)

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