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Formation of Pd Nanodots Induced by Remote Hydrogen Plasma and Its Application to Floating Gate MOS Memories.
Kazuhiro Shimanoe
Katsunori Makihara
Mitsuhisa Ikeda
Seiichi Miyazaki
Published in:
IEICE Trans. Electron. (2009)
Keyphrases
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floating gate
chemical vapor deposition
thin film
real time
high density
data sets
power consumption