Login / Signup

Predictive control of aggregate surface morphology in a two-stage thin film deposition process for improved light trapping.

Jianqiao HuangGerassimos OrkoulasPanagiotis D. Christofides
Published in: ACC (2012)
Keyphrases
  • thin film
  • predictive control
  • white light interferometry
  • film thickness
  • control scheme
  • multi layer
  • high density
  • chemical vapor deposition
  • short circuit
  • genetic algorithm
  • data streams
  • power plant