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Monitoring of a sampled process data under Run-to-Run control: application to a semiconductor process.
Taki Eddine Korabi
Guillaume Graton
El Mostafa El Adel
Mustapha Ouladsine
Jacques Pinaton
Published in:
CASE (2019)
Keyphrases
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human errors
data sets
database
data analysis
data points
high quality
data distribution
data collection
tool wear
process control
data quality
data acquisition
experimental data
process model
privacy preserving
data sources
decision trees
website
databases
real time