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A nondestructive automated defect detection system for silicon carbide wafers.
Toshiro Kubota
Parag Talekar
Xianyun Ma
Tangali S. Sudarshan
Published in:
Mach. Vis. Appl. (2005)
Keyphrases
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defect detection
semi automated
high speed
integrated circuit
feature extraction
automated analysis
textured surfaces
fully automated
low cost
computer vision
machine learning
fully automatic
computer aided
data structure
real world
data sets
real time