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Fabrication of Porous Silicon Based Humidity Sensing Elements on Paper.
Tero Jalkanen
Anni Määttänen
Ermei Mäkilä
Jaani Tuura
Martti Kaasalainen
Vesa-Pekka Lehto
Petri Ihalainen
Jouko Peltonen
Jarno Salonen
Published in:
J. Sensors (2015)
Keyphrases
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high density
high speed
data acquisition
plasma etching
semiconductor devices
low cost
monitoring system
integrated circuit
sensor networks
real time
magnetic recording
genetic algorithm
low power
sensor fusion
low density