Variable Control Design and its Application to Wafer Scanners.
Marcel HeertjesNathan van de WouwPublished in: CDC (2006)
Keyphrases
- software architecture
- mechanical systems
- user interface
- control system
- computer aided
- data acquisition
- high level synthesis
- control unit
- design decisions
- database
- design process
- building blocks
- low cost
- control strategy
- control method
- three dimensional
- control structure
- design procedure
- website
- information retrieval
- neural network