A hierarchical approach to production control of reentrant semiconductor manufacturing lines.
Felipe D. Vargas-VillamilDaniel E. RiveraKarl G. KempfPublished in: IEEE Trans. Control. Syst. Technol. (2003)
Keyphrases
- semiconductor manufacturing
- process control
- discrete event simulation
- control system
- production system
- control strategy
- optimal control
- product quality
- control strategies
- control method
- manufacturing process
- vision system
- straight line
- robotic systems
- database
- hierarchical structure
- hough transform
- d objects
- image processing
- information retrieval
- data sets