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Study of copper drift during TDDB of intermetal dielectrics by using fully passivated MOS capacitors as test vehicle.

Kristof CroesG. CannatáL. ZhaoZsolt Tokei
Published in: Microelectron. Reliab. (2008)
Keyphrases
  • experimental study
  • thin film
  • database
  • neural network
  • real world
  • data mining
  • artificial intelligence
  • empirical studies
  • statistical analysis
  • simulation study
  • experimental design
  • vehicle detection