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Multiphysics simulation study of thermal stress effects in nanoscale FinFETs heterogeneously integrated with GaN high-power device on silicon substrate.

Huali DuanErping LiQinyi HuangYuehang XuWenchao Chen
Published in: Microelectron. J. (2024)
Keyphrases
  • simulation study
  • high power
  • high density
  • field effect transistors
  • semiconductor devices
  • low power
  • monte carlo
  • low cost
  • high speed
  • thin film
  • steady state
  • data center
  • power supply
  • neural network
  • multiscale