Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers.
Hongwei XuWei QinYoulong LvJie ZhangPublished in: IEEE Trans. Ind. Informatics (2022)
Keyphrases
- data driven
- prediction accuracy
- virtual reality
- virtual environment
- prediction model
- virtual world
- real world
- information retrieval
- camera calibration
- semiconductor manufacturing
- linear predictors
- integrated circuit
- artificial intelligence
- multiresolution
- viewpoint
- multiscale
- image processing
- prediction error
- databases
- adaptive learning
- prediction algorithm
- data sets
- real time