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Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling.

Antoine LegrainT. G. JansonJ. W. BerenschotGijs J. M. KrijnenLeon AbelmannNiels R. Tas
Published in: NEMS (2013)
Keyphrases
  • complex structures
  • evolutionary algorithm
  • semiconductor manufacturing
  • databases
  • machine learning
  • knowledge base
  • image segmentation
  • multi agent
  • artificial neural networks
  • denoising
  • integrated circuit