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Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling.
Antoine Legrain
T. G. Janson
J. W. Berenschot
Gijs J. M. Krijnen
Leon Abelmann
Niels R. Tas
Published in:
NEMS (2013)
Keyphrases
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complex structures
evolutionary algorithm
semiconductor manufacturing
databases
machine learning
knowledge base
image segmentation
multi agent
artificial neural networks
denoising
integrated circuit