High Performance Lithography Hotspot Detection With Successively Refined Pattern Identifications and Machine Learning.
Duo DingJ. Andres TorresDavid Z. PanPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2011)
Keyphrases
- machine learning
- automatic detection
- pattern detection
- detection rate
- false alarms
- natural language processing
- data mining
- detection method
- neural network
- cost effective
- knowledge acquisition
- object detection
- detection scheme
- detection accuracy
- artificial intelligence
- anomaly detection
- detection algorithm
- information extraction
- machine learning methods
- false positives
- data analysis
- computer vision
- image segmentation
- learning problems
- learning tasks
- event detection
- active learning
- pattern matching
- reinforcement learning
- model selection
- knowledge representation
- text classification
- computational intelligence
- three dimensional
- support vector machine