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Enhancing the yield competitiveness of a semiconductor fabrication factory with dynamic capacity re-allocation.
Toly Chen
Published in:
Comput. Ind. Eng. (2009)
Keyphrases
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dynamic environments
plasma etching
integrated circuit
real time
high density
learning algorithm
search engine
manufacturing systems
combinatorial auctions
dynamically changing
production line
dynamic allocation
semiconductor devices
wafer fabrication