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Measurement Sensitivity and Reliability Analysis of the Space Charge Ellipsometry Detection System.

Haoyu GaoHanwen RenQingmin LiTianrun QiYiqun MaTao XiaoYidan Ma
Published in: IEEE Trans. Instrum. Meas. (2023)
Keyphrases
  • reliability analysis
  • space charge
  • false positives
  • detection algorithm
  • false alarms
  • neural network
  • detection method
  • high sensitivity
  • databases
  • optimization model