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Determination of Silicon Film Thickness in SOI Capacitors.
Victor Sonnenberg
João Antonio Martino
Published in:
LATW (2000)
Keyphrases
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film thickness
thin film
silicon on insulator
high density
refractive index
electrical properties
low cost
high speed
room temperature
integrated circuit
viewpoint
cmos technology
image data
cost effective
low power
white light interferometry