Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits.

Niels Quack Hamed Sattari Alain Y. Takabayashi Yu Zhang Pierre Edinger Carlos Errando-Herranz Kristinn B. Gylfason Xiaojing Wang Frank Niklaus Moises A. Jezzini How Yuan Hwang Peter O'Brien Marco A. G. Porcel Cristina Lerma Arce Saurav Kumar Banafsheh Abasahl Peter Verheyen Wim Bogaerts

Published in: OFC (2019)

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