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Modeling and characterization of thin film polysilicon in thermally driven MEMS actuators.

Shahabeddin Vamegh EstahbanatiMaher Bakri-KassemRached Dhaouadi
Published in: MWSCAS (2016)
Keyphrases
  • thin film
  • high density
  • random access memory
  • control system
  • neural network
  • multi layer
  • databases
  • short circuit